High dynamic range structured illumination microscopy based on multi-channel fusion and dual-phase binary fringe

Area of Science:

• Optics
• Microscopy
• Image Reconstruction

Background:

• Binary fringe projection is efficient for 3D structured illumination microscopy (SIM).
• Limitations include fringe edge blurring and exposure issues on reflective surfaces, causing measurement failures.
• Existing methods struggle with high dynamic range reconstruction.

Purpose of the Study:

• To develop a high dynamic range SIM (MFDBF-SIM) overcoming limitations of binary fringe projection.
• To improve 3D reconstruction integrity and accuracy, especially on challenging reflective surfaces.
• To address issues like fringe edge blurring and localized over/underexposure.

Main Methods:

• Multi-channel fusion and dual-phase binary fringe (MFDBF-SIM) approach.
• Phase shifting between adjacent binary fringes to distribute zero-modulation regions.
• Adaptive selection of modulation curves using RGB channel intensity responses.
• Development of horizontal and scanning-step calibration models for error compensation.

Main Results:

• MFDBF-SIM effectively distributes zero-modulation regions, preventing local information loss.
• High dynamic range reconstruction is achieved by adaptively selecting modulation curves.
• Horizontal and axial focal-plane errors are compensated.
• Reconstruction integrity improved by 121.5% (green channel) and 224.6% (blue channel) on silicon wafers and PCBs.

Conclusions:

• MFDBF-SIM significantly enhances 3D reconstruction integrity and accuracy.
• The method overcomes key limitations of binary fringe projection SIM on reflective surfaces.
• MFDBF-SIM offers a robust solution for high dynamic range 3D measurements in microscopy.