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Kinetically Controlled Direct In Situ Photolithography of Perovskite Color-Conversion Layers.

Mingyu Hwang1, Jaedong Jang2, Jun-Seo Lee2

  • 1Graduate School of Semiconductor Technology, School of Electrical Engineering, Korea Advanced Institute of Science and Technology (KAIST), Yuseong-gu, Daejeon, Republic of Korea.

Small (Weinheim an Der Bergstrasse, Germany)
|July 3, 2026
PubMed
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This summary is machine-generated.

Researchers developed a new photolithography method for high-resolution metal halide perovskite color-conversion layers. This technique achieves fine patterning and tunable colors, enhancing micro-display applications.

Area of Science:

  • Materials Science
  • Optoelectronics
  • Nanotechnology

Background:

  • Metal halide perovskites (MHPs) are excellent for color-conversion layers (CCLs) due to strong light absorption and narrow emission.
  • Patterning thick MHP CCLs at high resolution is difficult because MHPs are sensitive to damage during conventional processes.
  • Direct in situ photolithography offers a way to create thick patterns without exposing MHPs to harsh conditions, but its resolution is limited.

Purpose of the Study:

  • To develop a high-resolution patterning method for micrometer-thick metal halide perovskite color-conversion layers.
  • To overcome the resolution limitations of existing direct in situ photolithography techniques.
  • To enable facile color tuning and improve the performance of MHP-based CCLs for micro-display applications.

Main Methods:

Keywords:
color‐conversion layercrosslinking kineticdirect in situ photolithographyhigh‐resolution patterningmetal halide perovskites

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  • Introduced a kinetically controlled direct in situ photolithography (KC-ISP) approach.
  • Controlled thiol-ene crosslinking kinetics and used a precursor-redistributing spin-washing step.
  • Achieved tunable colors by adjusting precursor composition.

Main Results:

  • Enabled high-resolution patterning of MHP CCLs with feature sizes down to approximately 3 µm.
  • Demonstrated facile color tunability through precursor composition control.
  • Observed enhanced photoluminescence quantum yield in MHPs after air exposure due to phase redistribution and defect passivation.
  • Achieved high blue light uptake (∼80% for green, ∼98% for red) and color-conversion efficiencies (∼45% for green, ∼30% for red) with ∼4 µm thick CCLs.

Conclusions:

  • The KC-ISP method successfully produces high-resolution, micrometer-thick MHP CCLs with tunable colors.
  • The improved MHP crystallization and passivation lead to enhanced optical properties.
  • KC-ISP shows significant potential for fabricating advanced micro-display components.