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Spectral and Angle-Resolved Magneto-Optical Characterization of Photonic Nanostructures

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Published on: November 21, 2019

A tri-axis optomechanical accelerometer with plasmonic MIM waveguide and structural direction-dependent optical

Hengameh Farrokhi¹, Sedighe Babaei Sedaghat²

¹Department of Electrical and Computer Engineering, Urmia University, Urmia, Iran.

Scientific Reports

|July 4, 2026

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This study introduces a novel tri-axis optomechanical accelerometer using a plasmonic platform for high-resolution, EMI-immune inertial sensing. It achieves sub-microgram resolution by converting nanoscale displacements into optical signals, enabling precise 3D acceleration vector reconstruction.

Area of Science:

Optomechanics
Plasmonics
MEMS (Micro-Electro-Mechanical Systems)

Background:

Traditional accelerometers face limitations in resolution and electromagnetic interference (EMI) immunity.
Optomechanical sensors offer potential for high sensitivity and inherent EMI immunity.
Plasmonic platforms enable miniaturization and novel transduction mechanisms.

Purpose of the Study:

To propose and analyze a novel tri-axis optomechanical accelerometer.
To integrate a monolithic MEMS suspension with a plasmonic platform for enhanced sensing.
To achieve high-resolution, EMI-immune inertial sensing with directional discrimination.

Main Methods:

Finite element simulations (FEM) for optimizing a modified frog-arm spring system.

Keywords:

Hybrid Plasmonic Waveguide (HPW)MOEMS sensor Metal–insulator–metal waveguide Modified frog-arm suspension Plasmonic waveguide Serpentine spring Structural direction-dependent optical signatures Tri-axis optomechanical accelerometer

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Finite-difference time-domain (FDTD) analysis for optical transduction using Hybrid Plasmonic Waveguides (HPW).

Pre-stressed analysis for structural stability and cross-axis coupling verification.

Main Results:

Optimized MEMS suspension with near-identical displacements and sensitivities across a wide bandwidth.
Demonstrated Fano-type resonance in HPW with low insertion loss across the visible-to-near-infrared spectrum.
Achieved sub-microgram resolution (NEA of [Formula: see text]) and directional acceleration discrimination via optical modulation.

Conclusions:

The proposed device offers a versatile framework for high-resolution, all-optical, EMI-immune plasmonic MOEMS.
The developed sensor enables precise reconstruction of 3D acceleration vectors.
This technology is suitable for advanced precision inertial sensing applications.