Related Experiment Video
Updated: Jul 8, 2026

Residue-Free Fabrication of van der Waals Heterostructures of Two-Dimensional Materials
Published on: July 18, 2025
Large-area two-dimensional MoO3 as a high-κ dielectric for van der Waals integration
Zhenliang Hu1, Bei Zhao1, Qiang Fu1
1School of Physics and Key Laboratory of Quantum Materials and Devices of Ministry of Education, Southeast University, Nanjing, China.
None:
Large-area high-quality dielectrics are essential for the integration of two-dimensional (2D) transistors. However, this integration remains challenging, especially for conventional dielectrics that require deposition processes. Adopting van der Waals (vdW) dielectrics is attractive. Molybdenum trioxide (α-MoO3) has been demonstrated as a vdW dielectric in 2D field-effect transistors (FETs), but previous demonstrations showed limited performance and small size. Here, we grow large-area single-crystalline MoO3 with uniform thickness and explore its properties as a dielectric. Single-crystalline MoO3 reaches the millimeter scale and maintains a high dielectric constant of ~ 18.5, low gate leakage of approximately 10-2 A cm-2 at 3.0 MV cm-1, and a large breakdown field of ~ 26.75 MV cm-1. Top-gated molybdenum disulfide (MoS2) transistors exhibit an average subthreshold swing of ~ 71 mV dec-1, and an on/off current ratio exceeding 108. Furthermore, we demonstrate MoO3-based integrated circuits and low-power complementary metal-oxide-semiconductor (CMOS) inverters.
Related Concept Videos
Electrostatic Boundary Conditions in Dielectrics
Consider a case where both the mediums across a boundary are two different dielectric materials. Recall that the electric field and electric displacement are proportional and related through the material's permittivity.
Capacitor With A Dielectric
Dielectrics are non-conducting materials with no free or loosely bound electrons. When a dielectric is...
Dielectric Polarization in a Capacitor
Susceptibility, Permittivity and Dielectric Constant
Van der Waals Interactions
Van der Waals Equation
First, the attractive forces between molecules, which are stronger at higher densities and reduce the pressure, are considered by adding to the pressure a term equal to the square of the molar density multiplied by a positive coefficient a. Second, the volume...

