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Related Experiment Video

Updated: Jul 15, 2026

In Situ Transmission Electron Microscopy with Biasing and Fabrication of Asymmetric Crossbars Based on Mixed-Phased a-VOx
09:49

In Situ Transmission Electron Microscopy with Biasing and Fabrication of Asymmetric Crossbars Based on Mixed-Phased a-VOx

Published on: May 13, 2020

Sample Preparation and Resistivity Measurements for Operando Transmission Electron Microscopy During Heating and

Dominique A Mattlat1, Chanwon Jung2, Pingjun Ying3

  • 1Max Planck Institute for Sustainable Materials; d.mattlat@mpi-susmat.de.

Journal of Visualized Experiments : Jove
|July 13, 2026
PubMed
Summary

Related Concept Videos

Preparation of Samples for Electron Microscopy01:20

Preparation of Samples for Electron Microscopy

To be visualized by an electron microscope, either transmission or scanning, biological samples need to be fixed (stabilized) so the electron beam does not destroy them and dried thoroughly (desiccated/dehydrated) so the vacuum does not affect them. Fixation needs to be done as quickly as possible because the sample properties will start changing as soon as it is removed from its natural environment. For example, in a tissue sample, the oxygen levels begin decreasing, causing an altered...

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This study presents a method for preparing transmission electron microscope (TEM) samples on microelectromechanical systems (MEMS) chips for in situ observation of thermoelectric devices under operating conditions. The approach enables reliable measurement of electrical resistivity, even at high temperatures.

Area of Science:

  • Materials Science
  • Nanotechnology
  • Solid State Physics

Background:

  • Material microstructure characterization is crucial for understanding properties.
  • Thermoelectric devices operate under high temperatures and electrical bias, altering microstructures.
  • In situ characterization requires specialized sample preparation techniques.

Purpose of the Study:

  • To develop a method for preparing transmission electron microscope (TEM) samples on in situ microelectromechanical systems (MEMS) chips.
  • To enable operando characterization of thermoelectric materials under heating and electrical biasing.
  • To accurately measure electrical resistivity and contact resistance of thermoelectric materials.

Main Methods:

  • Focused ion beam (FIB) lift-out technique for sample preparation on MEMS chips.

Related Experiment Videos

Last Updated: Jul 15, 2026

In Situ Transmission Electron Microscopy with Biasing and Fabrication of Asymmetric Crossbars Based on Mixed-Phased a-VOx
09:49

In Situ Transmission Electron Microscopy with Biasing and Fabrication of Asymmetric Crossbars Based on Mixed-Phased a-VOx

Published on: May 13, 2020

  • Ion beam deposition of platinum-carbon (Pt-C) for electrical contact formation.
  • In situ electrical measurements and focused ion beam (FIB) thinning for resistance analysis.

    • Main Results:

    • Successful preparation of TEM samples on heating and biasing MEMS chips.
    • Demonstrated reduction in contact resistance upon heating to 200 °C.
    • Reliable measurement of electrical resistivity from high temperatures down to room temperature, independent of contact resistance.

    Conclusions:

    • The developed FIB-based sample preparation method is effective for in situ TEM studies of thermoelectric materials.
    • The technique allows for accurate electrical resistivity measurements by mitigating contact resistance issues.
    • This approach facilitates the understanding of microstructural evolution and its impact on thermoelectric device performance.