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A novel high-sensitivity triaxial accelerometer based on 3-D phononic crystals.

Xu Guo¹, Jiehe Wang¹, Jintao Ni¹

¹Microsystems Technology Research Center, School of Mechanical Science and Engineering, Huazhong University of Science and Technology, Wuhan, Hubei, China.

Microsystems & Nanoengineering

|July 14, 2026

Summary

This study introduces a novel 3D phononic crystal (PnC) accelerometer for high-sensitivity triaxial acceleration sensing. The PnC design offers a compact alternative to conventional multi-transducer accelerometers.

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Area of Science:

Physics
Materials Science
Engineering

Background:

Conventional triaxial accelerometers often involve multiple single-axis transducers, leading to increased size and complexity.
Phononic crystals (PnCs) offer high-sensitivity acceleration sensing due to their resonant cavities with high-quality factors.

Purpose of the Study:

To propose and validate a novel triaxial accelerometer design based on three-dimensional (3D) phononic crystals (PnCs).
To demonstrate a compact and integrated solution for high-sensitivity triaxial acceleration sensing.

Main Methods:

Utilized the finite element method (FEM) to compute the band structure and transmission spectra of 3D PnCs with introduced defects.
Designed a 3D PnC structure with point defects along x/y axes and a line defect along the z-axis to create resonant cavities.
Fabricated and experimentally validated the proposed PnC accelerometer design.

Main Results:

The 3D PnC accelerometer demonstrated high-sensitivity triaxial acceleration sensing capabilities.
Experimental results showed sensitivities of 1.58 kHz/g (x-axis), 0.62 kHz/g (y-axis), and 0.43 kHz/g (z-axis).
Achieved measurement bandwidths of 37.1 Hz (x-axis), 15.9 Hz (y-axis), and 37.4 Hz (z-axis).

Conclusions:

The proposed 3D PnC accelerometer design is suitable for high-sensitivity triaxial acceleration sensing.
This single-structure design offers a significant advantage in size and complexity reduction compared to conventional methods.
The PnC accelerometer shows potential for integration with ultrasonic transducers for compact microsystems.