Updated: Jul 16, 2026

Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
Published on: July 5, 2016
Zhe Weng1,2, Yiyu Zhao1,2, Zhiming Qing1,2
1National Laboratory of Solid State Microstructures and School of Physics, Nanjing University, Nanjing, China.
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