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Updated: Aug 5, 2026
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Design and Characterization Methodology for Efficient Wide Range Tunable MEMS Filters
Published on: February 4, 2018
Model-Based Optimization of Electret-Nanofiber Hybrid Multilayer Filters with Stable Performance Under ISO 29463
Seunguk Lee1,2, Jeonghyeon Lee1, Chanhyun Lee1
1Newrizon Inc., Busan 48228, Republic of Korea.
Polymers
|July 28, 2026
Summary
A novel electret-nanofiber hybrid filter offers superior particulate control and energy efficiency for cleanrooms. This advanced filtration system significantly outperforms conventional filters, meeting strict international standards.
Area of Science:
- Materials Science
- Chemical Engineering
- Environmental Engineering
Background:
- Miniaturization in semiconductor and battery manufacturing demands stringent cleanroom particulate control and energy efficiency.
- Conventional melt-blown (MB) electret filters degrade under discharge, while glass fiber filters cause high pressure drops.
Purpose of the Study:
- To propose and optimize an electret-nanofiber hybrid multilayer filter.
- To develop a dual-efficiency model integrating slip flow and structural resistance for filter optimization.
Main Methods:
- Developed a dual-efficiency model incorporating slip flow effects and a structural resistance factor (β = 0.125).
- Validated the model through experimental testing and compared performance against conventional filters.
Main Results:
- The model achieved high predictive accuracy (R² = 0.9995).
- The optimized hybrid filter retained >98.1% efficiency post-discharge, outperforming MB filters (41.4%).
- The hybrid filter achieved a quality factor (QF) of 0.117, double that of glass fiber filters.
Conclusions:
- The developed model provides robust design guidelines for energy-efficient air filtration.
- The hybrid filter meets stringent international standards for cleanroom applications.
- This research paves the way for next-generation high-performance air filtration systems.
