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Characteristic analysis of a capacitive pressure-sensitive structure with dual movable electrode plates
Jianxing Wang1, Rongyan Chuai1, Xin Li1
1School of Information Science and Engineering, Shenyang University of Technology, Shenyang 110870, China.
The Review of Scientific Instruments
|July 28, 2026
Summary
This study introduces a novel dual movable electrode plates (DMCPSS) capacitive pressure sensor. This design significantly enhances pressure sensitivity and measurement resolution for barometric altimeters.
Area of Science:
- Microelectromechanical Systems (MEMS)
- Sensor Technology
- Solid-State Physics
Background:
- Conventional capacitive pressure sensors utilize a single movable diaphragm.
- Enhancing measurement resolution in barometric altimeters is crucial for precise altitude determination.
- Existing designs face limitations in sensitivity and resolution.
Purpose of the Study:
- To propose and analyze a novel capacitive pressure-sensitive structure with dual movable electrode plates (DMCPSS).
- To enhance the pressure sensitivity and measurement resolution of barometric altimeters.
- To evaluate the performance of the DMCPSS under varying pressure and temperature conditions.
Main Methods:
- Design and simulation of a dual movable electrode plates capacitive pressure-sensitive structure.
- Finite element analysis (FEA) to model diaphragm deformation and capacitance change.
- Experimental evaluation of relative sensitivity and temperature coefficient of capacitance.
Main Results:
- The proposed DMCPSS structure demonstrates a 50% higher relative sensitivity compared to conventional single-diaphragm structures.
- FEA confirmed amplified capacitance change due to synchronous diaphragm deformation.
- The DMCPSS exhibited a temperature coefficient of capacitance of 935 ppm/°C at 101 kPa across a -40 to 120°C range.
Conclusions:
- The DMCPSS design effectively amplifies capacitance variation, leading to improved pressure sensitivity.
- This novel structure offers a significant advancement for high-resolution barometric altimeter applications.
- The DMCPSS shows promising performance characteristics for practical sensor deployment.
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