Mechanical characterization of vertically aligned carbon nanotube forest microelectrodes for neural interfacing

This study aims to explore the mechanical properties of porous microelectrodes formed from vertically aligned carbon nanotube (CNT) forests. Specifically, we investigate the range of effective CNT-based microelectrode (ME) moduli that can be fabricated and identify moduli within that range that significantly reduce strain on brain tissue during micromotion.

To address these questions, we developed a micromechanical measurement method, known as the dual deflection (DD) test, which is compatible with microelectrode array (MEA) form factors and can measure a wide range of moduli with a 30% uncertainty. Using the DD test with small deflections, we measured the effective Young's modulus of freestanding CNT microelectrodes (MEs) fabricated with different carbon infiltration times (0, 15, and 30 s) at 900°C. We also developed a static 10 μm deflection finite element analysis (FEA) model to compare the brain tissue strain induced by probes with the maximum (1.7 GPa), median (72 MPa), and minimum (3.9 MPa) measured CNT moduli, along with the modulus of silicon (165 GPa) for comparison.

The DD test results showed mean effective moduli of 19.6 ± 14.5 MPa, 67.7 ± 22.7 MPa, and 168 ± 62.3 MPa for arrays fabricated with 0, 15, and 30 s infiltrations, respectively. The FEA model revealed that probes with the maximum CNT modulus induced similar strain to the silicon probes at the tip, while probes with the minimum and median CNT moduli showed minimal strain at the tip.

These findings suggest that CNT microelectrodes with moduli in the tens of MPa range, achievable through 15 s of carbon infiltration, can significantly reduce brain tissue strain. Additionally, we consistently observed that microelectrodes with 15 s of infiltration were apparently undamaged after deflection, making them mechanically promising candidates for neural probe arrays.