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A flexible impedance-based microsystem for multi-parameter sensing in ionic solutions
Haoxin Hu1,2, Wenlin Xiao1,2, Yubin Ma1,2
1State Key Laboratory of Radio Frequency Heterogeneous Integration, Shenzhen University, 518060, Shenzhen, China.
Microsystems & Nanoengineering
|August 4, 2026
Summary
This study introduces a flexible microsystem for simultaneous flow, temperature, and conductivity sensing in liquids. The device offers precise measurements for microfluidic and biomedical applications.
Area of Science:
- Materials Science and Engineering
- Micro/Nano Systems
- Electrochemical Sensors
Background:
- Accurate multi-parameter sensing is crucial for microfluidic and biomedical applications.
- Existing microsystems often lack integrated capabilities for simultaneous flow, temperature, and conductivity measurements.
- Challenges include sensor miniaturization, noise reduction, and maintaining accuracy across varying conditions.
Purpose of the Study:
- To develop a flexible multi-sensor (FMS) microsystem for simultaneous measurement of flow, temperature, and ionic conductivity.
- To integrate electrochemical impedance (EI)-based thermal flow sensing, resistive temperature sensing, and impedance-based conductivity sensing.
- To design a custom analog-front-end (AFE) CMOS integrated circuit (IC) for precise control and high-signal-to-noise ratio (SNR) impedance readout.
Main Methods:
- Implementation of an FMS on a thin polyimide (PI) substrate.
- Integration of EI-based thermal flow sensing, resistive temperature sensing, and impedance-based conductivity sensing.
- Utilizing a current-balanced instrumentation amplifier (CBIA) architecture within the AFE CMOS IC for impedance readout.
Main Results:
- The EI-based thermal flow sensor demonstrated a measurement range up to 1200 μm/s with a detection limit of 3.36 μm/s.
- The integrated temperature sensor achieved an accuracy of ±0.13 °C over a 10-40 °C range, with minimal thermal crosstalk (<0.1 °C).
- Ionic conductivity was measured from 5-35 mS/cm with <3% error, owing to effective temperature compensation.
Conclusions:
- A compact, low-noise, and portable flexible microsystem capable of simultaneous multi-parameter sensing (flow, temperature, conductivity) has been successfully demonstrated.
- The developed FMS platform is well-suited for advanced microfluidic and biomedical applications requiring precise ionic solution analysis.
- The integration of multiple sensing modalities on a single flexible substrate represents a significant advancement in miniaturized sensing technology.
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