Phase-Dependent Oxygen Defect Energetics in Epitaxial NbN/AlN/NbN Films

Prachi Garg1, Kedarsh Kaushik2,3, Danqing Wang4

  • 1Department of Materials Design and Innovation, University At Buffalo, Buffalo, New York, USA.

Summary

Understanding defects in epitaxial all-nitride Josephson junctions is key for high-coherence superconducting qubits. This study reveals how oxygen impurities distribute differently in various niobium nitride polymorphs, impacting device performance.