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Updated: Aug 7, 2026

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Plasma-assisted Molecular Beam Epitaxy of N-polar InAlN-barrier High-electron-mobility Transistors
Published on: November 24, 2016
Phase-Dependent Oxygen Defect Energetics in Epitaxial NbN/AlN/NbN Films
Prachi Garg1, Kedarsh Kaushik2,3, Danqing Wang4
1Department of Materials Design and Innovation, University At Buffalo, Buffalo, New York, USA.
Advanced Science (Weinheim, Baden-Wurttemberg, Germany)
|August 5, 2026
Summary
Understanding defects in epitaxial all-nitride Josephson junctions is key for high-coherence superconducting qubits. This study reveals how oxygen impurities distribute differently in various niobium nitride polymorphs, impacting device performance.
Area of Science:
- Materials Science
- Quantum Computing
- Solid State Physics
Background:
- Epitaxial all-nitride Josephson junctions are crucial for advancing superconducting qubits.
- Nanoscale defects significantly hinder the performance of these quantum devices.
- Understanding the interplay between material structure, defect chemistry, and device behavior is essential for improvement.
Purpose of the Study:
- To investigate the atomic-scale structural and chemical defects in different epitaxial nitride Josephson junction heterostructures.
- To elucidate the relationship between niobium nitride polymorph selection, impurity distribution, and device performance.
- To provide mechanistic insights into defect chemistry's role in epitaxial nitride Josephson junctions.
Main Methods:
- Epitaxial growth of 𝛿-NbN/AlN/𝛿-NbN, 𝛾-Nb4N3/AlN/𝛾-Nb4N3, and β-Nb2N/AlN/β-Nb2N heterostructures using molecular beam epitaxy.
- Integration of advanced microscopy techniques with density functional theory (DFT) calculations.
- Analysis of impurity distribution and segregation behavior across different polymorphs.
Main Results:
- Observed varying impurity (oxygen) distribution across different niobium nitride polymorphs.
- δ-NbN electrodes showed significant oxygen content, while oxygen segregated to the AlN barrier in β-Nb2N/AlN/β-Nb2N heterostructures.
- DFT calculations confirmed phase-dependent oxygen energetics and diffusion kinetics, explaining observed impurity trapping and mobility differences.
Conclusions:
- Structural and chemical differences in epitaxial nitride Josephson junctions are linked to polymorph-dependent defect chemistry.
- Impurity distribution significantly influences transport behavior and may contribute to decoherence in superconducting quantum circuits.
- This work provides critical insights for mitigating defects and enhancing the performance of superconducting qubits.
Keywords:
atom probe tomographydensity functional theory modelinginterface sciencequantum technologyscanning tunneling electron microscopysuperconductivityMore Related Videos
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