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Updated: Aug 8, 2026

A Fabrication and Measurement Method for a Flexible Ferroelectric Element Based on Van Der Waals Heteroepitaxy
Published on: April 8, 2018
High-Entropy Flexible Ferroelectric Thin Film with Large Polarization for Nonvolatile Memory
Chengwen Bin1, Xu Hou2,3, Xinghua Zhu4
1School of Integrated Circuits Science and Engineering, Southwest Jiaotong University, Chengdu, Sichuan611756, China.
None:
The rapid advancement of flexible electronics has created an urgent demand for high-performance nonvolatile memory. However, conventional ferroelectric films face an intrinsic trade-off between performance and reliability in flexible applications. In this work, a high-entropy Pb0.9Ba0.1Ti0.25Hf0.25Zr0.25Sn0.25O3 (PBTHZS) ferroelectric thin film is successfully fabricated on a flexible mica substrate. Based on entropy engineering, we introduced multiple cation solid solutions to induce structural local disorder and lattice distortion at the atomic scale. This leads to a rearrangement of electron distribution in the system, and the coupling with lattice expansion enhances macroscopic polarization. As a result, the PBTHZS thin film exhibits outstanding ferroelectric properties (remnant polarization of Pr ∼62.2 μC/cm2 and maximum polarization of Pm ∼131.5 μC/cm2), stable fatigue endurance up to 108 switching cycles, minimal polarization variation across a broad temperature range of 25-120 °C, and a frequency range of 0.5-10 kHz. Furthermore, there is no apparent variation in polarization characteristics under different bending conditions. This study demonstrates that the high-entropy strategy effectively enhances the polarization performance in ferroelectric nonvolatile memory, offering a pathway for the development of next-generation flexible electronic devices.
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