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Spray Pyrolysis of Ternary Oxides: From Precursor Selection to Surface Reactions
Karsten Fleischer1,2, Priyanka Bhatnagar1, Ciarán Cooling1
1School of Physical Sciences, Dublin City University, D09 V209 Dublin, Ireland.
Materials (Basel, Switzerland)
|August 13, 2026
Summary
Spray pyrolysis enables low-cost thin-film synthesis. This study details controlling stoichiometry in complex oxides by managing precursor properties and process parameters for improved film quality.
Area of Science:
- Materials Science
- Thin-Film Deposition
- Chemical Engineering
Background:
- Spray pyrolysis is a cost-effective technique for synthesizing thin films.
- Complex oxides (ternary and quaternary) present challenges in stoichiometry control during deposition.
- Understanding precursor behavior and process parameters is crucial for successful thin-film fabrication.
Purpose of the Study:
- To investigate the critical factors influencing stoichiometry transfer in spray pyrolysis for ternary and quaternary oxides.
- To demonstrate how precursor characteristics and experimental setup affect film composition and homogeneity.
- To provide guidance for optimizing spray pyrolysis for complex oxide thin films.
Main Methods:
- Real-time optical monitoring of individual precursor behavior (Cu, Cr, Zn, Sn).
- X-ray photoelectron spectroscopy (XPS) for post-growth film composition analysis.
- Systematic variation of experimental parameters (e.g., instrument geometry, nozzle type) using binary Cu2O as a model.
Main Results:
- Precursor solubility, thermal decomposition, and intermediate species desorption significantly impact stoichiometry.
- Demonstrated control over stoichiometry transfer for ternary transparent conducting oxides (TCOs) like CuₓCrO₂, SnTiOₓ, and a-ZnSnO₃.
- Instrument geometry and nozzle type were shown to influence the homogeneity of binary Cu₂O films.
Conclusions:
- Spray pyrolysis requires careful consideration of precursor chemistry and process parameters for precise stoichiometry control in complex oxides.
- The findings offer insights into overcoming challenges in depositing ternary and quaternary oxide thin films.
- An overview of suitable precursor salts is provided to aid future research in ternary oxide synthesis.
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