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Published on: August 2, 2016
Velocity-Sensor-Based Dual-ESO Reconstruction for Feedforward-Feedback Low-Frequency Active Micro-Vibration Isolation
Zhenyu Fan1,2,3, Yong Xie1, Yuzhang Zhu1,2,4
1Key Laboratory of Space Active Opto-Electronics Technology, Shanghai Institute of Technical Physics, Chinese Academy of Sciences, Shanghai 200083, China.
Sensors (Basel, Switzerland)
|August 13, 2026
Summary
This study introduces a dual extended state observer (ESO) method for active vibration isolation. It effectively reduces micro-vibration using only velocity sensors, enhancing precision instrument stability.
Area of Science:
- Mechanical Engineering
- Control Systems Engineering
- Physics
Background:
- Low-frequency vibrations degrade precision instruments.
- Velocity-sensor-based isolation lacks displacement feedback.
- Existing methods face drift and noise issues.
Purpose of the Study:
- To develop a novel active vibration isolation method using only velocity measurements.
- To reconstruct unavailable displacement states and smooth velocity feedforward.
- To improve stability for precision payloads and inertial systems.
Main Methods:
- Proposed a dual extended state observer (ESO) reconstruction method.
- Combined equivalent-displacement feedback and lower-platform feedforward.
- Implemented on a plate-type active vibration isolation platform.
Main Results:
- Achieved an integrated input-output suppression ratio of 38.67±0.46 dB.
- Reduced upper-platform output acceleration RMS to (1.31±0.09)×10-7 g.
- Demonstrated a 48.92±2.12 dB RMS reduction compared to the passive baseline.
Conclusions:
- Low-frequency active micro-vibration isolation is achievable with only velocity sensors.
- The dual ESO method effectively reconstructs states and smooths feedforward.
- Eliminates the need for additional displacement sensors in active isolation systems.
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