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Updated: Aug 14, 2026

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Fabrication of Micro-Patterned Chip with Controlled Thickness for High-Throughput Cryogenic Electron Microscopy
Published on: April 21, 2022
Developing the NewAthena X-IFU Cryogenic AntiCoincidence Detector (CryoAC): From Microfabrication Process
Claudio Macculi1, Matteo D'Andrea1, Giacomo Gorla1,2
1INAF/IAPS Roma, Via del Fosso del Cavaliere 100, 00133 Rome, Italy.
Sensors (Basel, Switzerland)
|August 13, 2026
Summary
The Cryogenic Anticoincidence (CryoAC) detector achieved Technology Readiness Level 5 (TRL5) validation for the NewAthena X-IFU instrument. This demonstrates successful microfabrication and mK operational performance for reduced particle background in space missions.
Area of Science:
- Astrophysics and Space Science
- Detector Technology
- Cryogenics
Background:
- The X-ray Integral Field Unit (X-IFU) instrument for the ESA NewAthena mission requires advanced particle background reduction.
- The Cryogenic Anticoincidence (CryoAC) detector is a critical subsystem for this purpose.
- Achieving Technology Readiness Level 5 (TRL5) necessitates unified validation of fabrication and low-temperature performance.
Purpose of the Study:
- To present the development cycle of the Demonstration Model 1.2 (DM 1.2) CryoAC detector.
- To demonstrate the TRL5 achievement by validating critical technologies operating simultaneously.
- To establish and verify microfabrication processes and mK operational performance.
Main Methods:
- Established single-process verification for Iridium pulsed laser deposition, Reactive Ion Etching (RIE), and Bosch process silicon trenching.
- Fabricated three identical single-pixel prototypes for mK characterization.
- Conducted functional testing at 50 mK using a VTT FAB4 SQUID readout.
Main Results:
- Achieved a 2/3 production yield against strict design targets (TC ~100 mK).
- Demonstrated a low-energy threshold of ~0.6 keV.
- Measured pixel power dissipation of 5.15 nW and energy resolution ΔEFWHM = 735 eV at 6 keV.
Conclusions:
- Successfully validated the CryoAC detector's manufacturing and operational baseline for space mission requirements.
- The DM 1.2 model successfully completed the TRL5 demonstration path.
- The CryoAC technology is ready for integration into the X-IFU instrument, paving the way for future X-ray astronomy missions.

