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A Multimodal Wide-Field Fourier-Transform Raman Microscope
Published on: December 30, 2025
High-resolution miniature Fourier transform spectrometer based on dual scanning electrothermal MEMS mirrors
Optics Express
|August 14, 2026
Summary
A novel dual-MEMS-mirror Fourier transform spectrometer (FTS) doubles the scanning range, significantly enhancing spectral resolution. This MEMS-FTS design achieves 0.5 nm resolution, ideal for portable spectral analysis.
Area of Science:
- Optics and Photonics
- Microelectromechanical Systems (MEMS)
Background:
- MEMS mirror-based Fourier transform spectrometers (FTS) offer portability but are limited by small scanning ranges, restricting spectral resolution.
- Existing MEMS-FTS designs face challenges in achieving high spectral resolution due to limited mirror displacement.
Purpose of the Study:
- To develop a dual-MEMS-mirror FTS (DMM-FTS) to overcome the spectral resolution limitations of single-mirror systems.
- To improve spectral resolution by doubling the scanning range using two MEMS mirrors.
Main Methods:
- Designed and implemented a DMM-FTS utilizing electrothermal MEMS mirrors with a maximum vertical displacement of 260 µm.
- Controlled the dynamic tilt of the MEMS micromirrors to within ±0.004° for stable optical path difference.
Main Results:
- Achieved a stable optical path difference up to 783 µm, effectively doubling the scanning range.
- Demonstrated a remarkable spectral resolution of 0.5 nm (18 cm⁻¹) at 532 nm wavelength.
- Confirmed compatibility with near-infrared and mid-infrared spectral analysis.
Conclusions:
- The DMM-FTS design significantly enhances spectral resolution by leveraging an increased scanning range.
- This technology offers improved spectral analysis performance for on-site and in-line real-time monitoring applications.
