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Fabrication and Characterization of Thickness Mode Piezoelectric Devices for Atomization and Acoustofluidics
Published on: August 5, 2020
Decoupling multiphysics interference for precise, real-time piezoresistive airflow sensing by integrated
Zihao Li1,2, Chunki Yiu3,4, Libei Huang5
1Department of Chemistry, State Key Laboratory of Marine Environmental Health, City University of Hong Kong, Hong Kong 999077, China.
Abstract:
Airflow sensing underpins applications in environmental monitoring, industrial safety, and wearable health care. Piezoresistive airflow sensors offer a compact and energy-efficient solution, yet their accuracy is severely compromised by complex multiphysical field perturbations. Here, we report an integrated graphene-based system fabricated by in situ laser printing that simultaneously measures airflow, temperature, and humidity. We reveal that a standalone piezoresistive airflow sensor can incur substantial errors exceeding 100% under fluctuating environmental conditions. Through targeted surface functionalization and microstructural engineering, we develop a humidity-insensitive temperature sensor, a high-fidelity humidity sensor, and a piezoresistive airflow sensor. Integrating these components into a multiphysics decoupling model enables analytical separation of intertwined signals, markedly reducing airflow measurement errors to below 5%. The optimized platform achieves high-precision, low power consumption, and strong integration airflow sensing with stable output under real-time fluctuations. These capabilities further allow dual-parameter airflow communication, while the scalable, mask-free laser-printing process provides a pathway toward portable, multifunctional sensing systems.
