High-Temperature Magnetic Field Mapping Using a Single-Crystal Diamond MEMS Resonator Array

Magnetic imaging has long faced fundamental trade-offs among speed, sensitivity, and spatial resolution, and its performance typically deteriorates at elevated temperatures. Here, we present a single-crystal diamond (SCD) microelectromechanical system (MEMS) resonator array for spatial magnetic-field mapping at elevated temperatures. An 8 × 8 cantilevers array enables pitch-limited spatial magnetic-field mapping with millisecond single-pixel temporal response and nT Hz^1/2 magnetic noise level at 573 K, while maintaining frequency stability at parts-per-billion precision. These capabilities exhibit competitive performance in sensing metrics, enabling two- and three-dimensional magnetic-field reconstruction and demonstrate elevated-temperature magnetic-field mapping up to 573 K. These results demonstrate the potential of SCD MEMS resonator array for spatial magnetic-field sensing under elevated-temperature conditions.