Design and Performance Study of an Ultrasonic Synthetic Jet Piezoelectric Pump Based on Multi-Level Structural...

The present work presents a new synthetic jet piezoelectric pump designed to address the airflow delivery needs arising from the increasing power density of high-performance microelectronics. Traditional miniaturized cooling techniques suffer from low efficiency, bulky size, and high cost, while microfluidic cooling has emerged as a vital chip thermal management method with outstanding miniature heat removal capacity. We systematically designed the vibration mode and pump structure, adopting the sixth-order resonant frequency as the operating frequency. A dual resonant layer with stiffness-guided fixed boundaries was employed to enhance vibration efficiency and energy conversion, together with an optimized flow channel layout and parametric design. Experiments conducted under 35 V square-wave excitation demonstrate that the 20 mm × 20 mm × 2.5 mm pump delivers a flow rate of 1.6 L/min and a back pressure of 2.7 kPa. This work provides a feasible technical route for large-scale airflow delivery applications of synthetic jet piezoelectric pumps, with potential for thermal management in microelectronic devices, while balancing excellent performance and low manufacturing cost.