Related Experiment Video
Updated: Sep 27, 2026
07:47
Use of Sacrificial Nanoparticles to Remove the Effects of Shot-noise in Contact Holes Fabricated by E-beam Lithography
Published on: February 12, 2017
Editorial for the Special Issue on Recent Advances in Lithography
Sikun Li1,2, Yayi Wei2,3, Hanzhi Zhang4,5
1Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China.
Micromachines
|September 26, 2026
Abstract:
Integrated circuits (ICs) constitute the fundamental hardware platform for modern information technology systems, enabling critical applications such as artificial intelligence, smartphones, computing systems, robotics, aerospace technologies, and the Internet of Things [...].
