Deconvolution method for extreme ultraviolet broadband imaging spectrometry using dispersion-matched zone plates

We present a method to retrieve spectrally resolved spatial emission profiles using a broadband EUV imaging spectrometer with a tapered zone plate that is dispersion-matched to a transmission grating. Optical propagation simulations provide wavelength-dependent point spread functions used for forward modeling and deconvolution of tin-based laser-produced plasma emission images. Comparison with plasma sources of known size demonstrates recovery of effective source widths consistent with the diffraction-limited resolution of the instrument (15 µm) and shows clear improvement over, and a significant difference (up to a factor of 2 in emission area) to earlier fitting-based analysis. This work paves the way for adopting the concept of the broadband imaging spectrometer to diagnose plasma in academic and industrial settings.