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Fabrication of Schottky Diodes on Zn-polar BeMgZnO/ZnO Heterostructure Grown by Plasma-assisted Molecular Beam Epitaxy
Published on: October 23, 2018
Epitaxial strategy for high-polarization semiconductor lasers with process robustness
Jialong Mu1,2, Ting Fu3, Tingyu Si4
1Laboratory of Solid State Optoelectronics Information Technology, Institute of Semiconductors, CAS, Beijing 100083, China.
Abstract:
We demonstrate an epitaxial strategy for improving the degree of polarization (DoP) of semiconductor lasers under packaging-induced stress by increasing the intrinsic TE/TM effective refractive-index difference, ndiff0. Three distinct epitaxial structures with ndiff0 values of 4.75 × 10-4, 9.09 × 10-4, and 1.24 × 10-3 were designed and fabricated. At 14 A, the measured DoP increased from 90.2% to 97.3% with increasing ndiff0. Structures with larger ndiff0 also exhibited lower sensitivity to packaging-induced stress variations. These results show that engineering ndiff0 through epitaxial design provides a practical route toward process-robust high-polarization semiconductor lasers.

