Investigation on Test Mass Capture of an Inertial Sensor via Torsion Pendulum Under Limited Electrostatic Actuation

Yongkun Chen1,2, Tao Yu1, Huadong Li1

  • 1Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China.

Micromachines
|October 27, 2026
PubMed

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