All-Euler-bend lithium niobate microresonators with intrinsic Q-factors exceeding 10 million
Related Experiment Video
Updated: Nov 1, 2026

Fabrication of Silica Ultra High Quality Factor Microresonators
Published on: July 2, 2012
Haoxuan Zhang1, Tuo Liu1, Biyan Zhan1
1Beijing Engineering Research Center of Mixed Reality and Advanced Display, MIIT Key Laboratory of Photonics Information Technology, School of Optics and Photonics, Beijing Institute of Technology, Beijing 100081, China.
Abstract:
We report an ultra-low-loss thin-film lithium niobate microresonator composed of all-Euler-bend geometries. This design allows the use of a multimode waveguide to reduce sidewall scattering loss while suppressing higher-order-mode excitation. Unlike racetrack designs, our microresonator contains no intermediate straight sections, yielding a lithography-friendly footprint of 0.9 mm × 1.7 mm that supports a free spectral range of ∼28.5 GHz and a high intrinsic quality factor of up to 1.2×107. By self-injection locking a distributed-feedback laser to the resonator, we obtained an integrated linewidth of 45.6 kHz within 100 ms, showing a 305-fold improvement over the free-running laser. We further observed low-noise Raman frequency combs at boosted pump powers. These results highlight the potential of all-Euler-bend microresonators for integrated photonic applications.

