Metasurface-integrated fully vertical micro-LEDs

We demonstrate electrically driven, fully vertical AlGaInP-based red micro-LEDs monolithically integrated with amorphous-silicon metasurfaces for directional beam control. Through tailored spatial phase responses, the metasurfaces reshape the angular emission to enable beam collimation and off-axis deflection. Measured angle-resolved emission profiles show that, relative to the broad reference emission extending to approximately ±60° from the surface normal, the collimating metasurface concentrates the light output within approximately ±20° around the surface normal, whereas the deflecting metasurface redirects the emission toward ∼15° off normal. These results demonstrate a scalable solution with potential applications in high-density micro-LED optical interconnect arrays.