Vibration-resistant temporal phase-shifting interferometry with enhanced amplitude-frequency product tolerance
Related Experiment Video
Updated: Nov 4, 2026

Implementation of a Reference Interferometer for Nanodetection
Published on: April 26, 2014
Fengrui Li1,2, Zhigang Han1,2, Jiarui Xu1,2
1School of Electronic Engineering and Optoelectronic Technology, Nanjing University of Science and Technology, Nanjing 210094, China.
Abstract:
Temporal phase-shifting interferometry (TPSI) is widely used for high-precision surface and wavefront measurements, but its tolerance to environmental vibration remains limited. To investigate vibration-resistant TPSI under large amplitude-frequency product conditions, we establish a vibration error-transfer model by decomposing cavity motion into tilt and axial components. The analysis shows that wavefronts obtained with fixed-step algorithms exhibit multiple error modes, whereas iterative algorithms reduce ripple residuals but cannot guarantee sign-correct reconstruction. To enhance the vibration tolerance of TPSI, a synchronous calibration-acquisition method integrating rapid wavelength tuning (RWT-SCA) is proposed. An experimental setup with a vibration simulator was constructed, and a point-by-point calibrated vibration amplitude-frequency sampling space was established. Quantitative experiments under sparse-fringe conditions show that the conventional calibration-then-acquisition method has a large sign-ambiguity region and an amplitude-frequency product tolerance of 2.28 × 102 nm·Hz, whereas RWT-SCA increases this tolerance to at least 5.06 × 103 nm·Hz. This investigation provides what is believed to be a new perspective on the quantitative characterization and improvement of TPSI vibration resistance.
Related Concept Videos
IR Spectrum Peak Splitting: Symmetric vs Asymmetric Vibrations
IR Frequency Region: X–H Stretching
Time and frequency -Domain Interpretation of Phase-lag Control
Phase-lag controllers do not place a pole at zero, but instead influence the steady-state error by amplifying any finite,...
