Unlocking the ideal ohmic contacts in MoSi2N4via MSene electrodes
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Updated: Nov 10, 2026

Ohmic Contact Fabrication Using a Focused-ion Beam Technique and Electrical Characterization for Layer Semiconductor Nanostructures
Published on: December 5, 2015
Luoling Zhong1, Wenjie Li1, Zhenkun Tang1,2
1College of Physics and Electronic Engineering, Hengyang Normal University, Hengyang 421002, China. liemao_cao@hynu.edu.cn.
Abstract:
The pursuit of low-resistance ohmic contacts in two-dimensional semiconductor devices remains a critical challenge for practical applications. Here, using first-principles calculations, we investigate the interfacial contact properties between monolayer MoSi2N4 and three MSene electrodes (M2S, M = V, Mo, W). After identifying the most stable stacking configuration, we find a systematic Schottky-to-Ohmic transition from V2S to W2S, driven by increasing interfacial charge transfer from the semiconductor to the metal. Notably, W2S/MoSi2N4 forms an ideal n-type ohmic contact with zero Schottky barrier. Moreover, all three heterostructures exhibit vanishing tunneling barriers, attributable to covalent-like quasi-bonding interactions at the short interlayer spacings. Although conventional barrier engineering via interlayer compression is precluded by the already near-covalent distances, external electric fields can still modulate the Schottky barrier, albeit with reduced efficiency. Our results establish W2S as a promising electrode candidate for MoSi2N4-based devices and provide insights into dipole engineering for contact optimization in strongly coupled van der Waals heterostructures.
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