Mass determination of thin biological specimens for use in quantitative electron probe X-ray microanalysis

In the quantitative electron probe X-ray microanalysis of thin specimens the total mass thickness of a specimen is often required to express the elemental content as fractions of the total mass. In the present paper three methods for the measurement of mass thickness of thin specimens are reviewed and compared as to their applicability for use in quantitative X-ray microanalysis. The methods are based on the use of the continuum X-ray intensity, the backscattered electron intensity, and the transmitted electron intensity, respectively. From experimental results, it is concluded that the mass measurement method, based on the transmitted electron intensity, gives more accurate mass values than does the continuum X-ray method. The use of an independent mass measurement method is advantageous when low temperature oxygen plasma ashing is applied to lower X-ray analysis detection limits. In this way, elements present in ashed specimens can be expressed as fractions of the original specimen mass.