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Resolution of annular-pupil optical systems

Y Horikawa1

  • 1T. Morokuma Research Laboratory, Olympus Optical Company, Ltd., Tokyo, Japan.

Journal of the Optical Society of America. A, Optics, Image Science, and Vision
|July 1, 1994
PubMed
Summary

Annular pupil objectives in soft-x-ray imaging show different resolution properties based on obstruction ratios. High-obstruction systems resolve bright points better but dark bars worse than low-obstruction systems.

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Area of Science:

  • Optics
  • Optical Engineering
  • Soft-X-ray Imaging

Background:

  • Optical system resolution is critical for imaging quality.
  • Annular pupil objectives are used in various optical systems, including soft-x-ray imaging.
  • Understanding their resolution properties is essential for optimizing performance.

Purpose of the Study:

  • To investigate and compare the resolution characteristics of optical systems employing annular pupil objectives.
  • To analyze how different obstruction ratios affect imaging performance, particularly in soft-x-ray applications.
  • To evaluate resolution using various metrics, including dark-bar and bright-point targets.

Main Methods:

  • Calculated resolution using partially coherent transfer functions.
  • Analyzed images of two dark bars in a bright field.
  • Evaluated knife-edge responses.
  • Compared results with conventional Rayleigh analysis for two bright points in a dark field.

Main Results:

  • Annular systems with obstruction ratios > 0.6 exhibit distinct resolution behaviors compared to low-obstruction systems.
  • High-obstruction-ratio systems showed lower resolution for dark-bar targets.
  • High-obstruction-ratio systems demonstrated higher resolution for bright-point targets.

Conclusions:

  • The obstruction ratio significantly influences the resolution performance of annular pupil objectives.
  • System design choices for annular pupils must consider the specific imaging task (e.g., resolving dark features vs. bright points).
  • Findings are particularly relevant for the design and application of soft-x-ray imaging optical systems.

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