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Measuring the performance of scanning electron microscope detectors

D C Joy1, C S Joy, R D Bunn

  • 1Oak Ridge National Laboratory, Tennessee, USA.

Scanning
|November 1, 1996
PubMed
Summary

A new digital method provides absolute performance measurements for scanning electron microscope (SEM) detectors. This technique allows for reliable comparisons between various detectors across different SEM instruments.

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Area of Science:

  • Materials Science
  • Analytical Chemistry
  • Physics

Background:

  • Scanning Electron Microscopy (SEM) is a crucial technique for materials characterization.
  • Accurate performance evaluation of SEM detectors is essential for reliable data acquisition.
  • Existing methods for detector performance assessment can be complex or lack absolute comparability.

Purpose of the Study:

  • To introduce a simple, absolute digital method for measuring SEM detector performance.
  • To enable direct comparison of different detectors on the same or different SEM instruments.
  • To validate the applicability of the method across various detector types.

Main Methods:

  • Development of a digital measurement technique for SEM detectors.
  • Application of the method to secondary electron (SE) detectors.

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  • Application of the method to backscattered electron (BSE) detectors.
  • Application of the method to energy-dispersive X-ray (EDX) detectors.

    • Main Results:

    • The developed digital method provides absolute performance values for SEM detectors.
    • The technique successfully measured performance across SE, BSE, and EDX detectors.
    • Measurements were demonstrated on a range of commercial detectors and SEM systems.
    • The method facilitates inter-instrument and inter-detector comparisons.

    Conclusions:

    • The described digital method offers a straightforward and absolute approach to SEM detector performance evaluation.
    • This technique enhances the reliability and comparability of data obtained from different SEM setups.
    • The method is versatile, applicable to commonly used SEM detectors and instruments.