XTEM sample preparation technique for n-type compound semiconductors using photochemical etching

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Comprehensive Characterization of Extended Defects in Semiconductor Materials by a Scanning Electron Microscope
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Comprehensive Characterization of Extended Defects in Semiconductor Materials by a Scanning Electron Microscope

Published on: May 28, 2016

S Tanaka1, H Fujii, M Hibino

  • 1Department of Electronics, Nagoya University, Japan.

Microscopy Research and Technique
|November 1, 1996
PubMed

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