Plan view TEM sample preparation for non-continuous and delaminating thin films

The preparation of plan view samples for TEM examination is generally a straightforward process except where the film delaminates from the substrate or is non-continuous. A method is described where film is first stabilised using an epoxy, then transferred to an aperature grid and ion milled to produce an electron transparent sample. This technique provides a relatively simple and fast method to prepare these types of films, using the standard equipment and supplies found in most TEM sample preparation laboratories.