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[Step height measurement in the micrometer range by two-ray interferometry with adjustable light wavelength (author's
Microscopica Acta
|July 1, 1977
Abstract:
The interferometric measurement of abrupt surface steps in the micrometer range requires additional means to give unique results. It will be shown, that advantageous interpretation of the interferometric fringes are possible by combining a two-ray interferometer with a monochromator.