U Wallrabe1, P Ruther, T Schaller
1Forschungszentrum Karlsruhe, Institut für Mikrostrukturtechnik, Germany. wallrabe@imt.fzk.de
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Miniaturized medical devices are crucial for modern surgery and analysis. Techniques like LIGA and microengineering enable the batch fabrication of microsystems, including hydraulic actuators and optical sensors for diverse medical applications.
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