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Lung function and general illness symptoms in a semiconductor manufacturing facility

J C Luo1, K H Hsu, L L Hsieh

  • 1Department of Public Health, Chang Gung Medical College, Tao-Yuan, Taiwan, ROC.

Journal of Occupational and Environmental Medicine
|November 4, 1998
PubMed
Summary

Workers in semiconductor manufacturing may face risks of restrictive lung abnormalities and irritation symptoms. This study highlights potential pulmonary health effects from occupational exposures in the industry, necessitating further investigation.

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Area of Science:

  • Occupational Health
  • Pulmonary Medicine
  • Industrial Hygiene

Background:

  • Semiconductor manufacturing utilizes potent gases, chemicals, and radiation.
  • Limited data exists on respiratory diseases linked to semiconductor industry exposures.

Purpose of the Study:

  • To assess pulmonary risks in semiconductor plant workers.
  • To evaluate lung function and symptoms associated with occupational exposures.

Main Methods:

  • Clinical survey of 926 workers, with detailed pulmonary function tests and questionnaires for 249.
  • Inclusion of chest X-rays and physical examinations.
  • Comparison of exposed workers with control groups.

Main Results:

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  • Higher prevalence of restrictive lung abnormality in male photolithographic and ion-implantation workers.
  • Increased airway and eye irritation, headaches, stress, tiredness, and memory issues in female workers in specific roles.
  • Borderline significant (P=0.06) and significant (P=0.02) findings for male workers.

    • Conclusions:

    • Restrictive lung abnormality is a potential health effect for male silicon-wafer fabrication workers.
    • Occupational exposures in semiconductor manufacturing may lead to adverse pulmonary and systemic health outcomes.
    • Further investigation into etiological factors and long-term health effects is warranted.