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Nature Photonics|October 7, 2017
<i>In-chip</i> microstructures and photonic devices fabricated by nonlinear laser lithography deep inside siliconOnur Tokel, Ahmet Turnali, Ghaith Makey, et al.
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Nature Photonics|October 7, 2017
<i>In-chip</i> microstructures and photonic devices fabricated by nonlinear laser lithography deep inside siliconOnur Tokel, Ahmet Turnali, Ghaith Makey, et al.
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