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Journal of the American Chemical Society|July 30, 2011
Using atomic layer deposition to hinder solvent decomposition in lithium ion batteries: first-principles modeling and experimental studiesKevin Leung, Yue Qi, Kevin R Zavadil, et al.Nano Letters|June 29, 2019
In Situ Thermal Atomic Layer Etching for Sub-5 nm InGaAs Multigate MOSFETsWenjie Lu, Younghee Lee, Jonas C Gertsch, et al.Nano Letters|June 22, 2012
Ultrathin oxide films by atomic layer deposition on grapheneLuda Wang, Jonathan J Travis, Andrew S Cavanagh, et al.ACS Applied Materials & Interfaces|April 21, 2020
Probing the Atomic-Scale Structure of Amorphous Aluminum Oxide Grown by Atomic Layer DepositionMatthias J Young, Nicholas M Bedford, Angel Yanguas-Gil, et al.Pageof 2