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Journal of the Optical Society of America. A, Optics, Image Science, and Vision|January 22, 2015
Advances in lithography: introduction to the featureAndreas Erdmann, Rongguang Liang, Apo Sezginer, et al.Applied Optics|January 22, 2015
Advances in lithography: introduction to the featureAndreas Erdmann, Rongguang Liang, Apo Sezginer, et al.Pageof 1