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Applied Optics|October 6, 2021
Correction of thickness uniformity of multilayer fluoride coatings on steep spherical substrates using shadowing mask combinations in planetary rotation systemsShuang Gong, Baoxi Yang, Huijie Huang
Applied Optics|April 26, 2022
Illumination uniformity correction by using dynamic gray filters in a lithography systemShuang Gong, Baoxi Yang, Huijie Huang
Applied Optics|September 15, 2015
Generation of trapezoidal illumination for the step-and-scan lithographic systemMing Chen, Liqun Chen, Aijun Zeng, et al.
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