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Nanotechnology
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April 15, 2025
Enhancing lithographic accuracy by mitigating overlay errors via mask-induced thermal and mechanical optimization
Dinghai Rui, Libin Zhang, Yayi Wei, et al.
Nanoscale Advances
|
September 8, 2025
Method of high-order advanced lithography overlay correction to enhance the manufacturing performance of integrated circuits
Dinghai Rui, Libin Zhang, Yayi Wei, et al.
Optics Express
|
July 30, 2025
Impact of mask errors on imaging quality in surface plasmon lithography
Dinghai Rui, LiBin Zhang, Yayi Wei, et al.
Optics Express
|
August 13, 2025
Super-resolution imaging using surface plasmon resonance cavity lithography
Dinghai Rui, LiBin Zhang, Huwen Ding, et al.
Optics Express
|
November 22, 2024
Source and mask optimization for stability of reticle and wafer stages
Hao Shen, Libin Zhang, Dinghai Rui, et al.
Nanotechnology
|
October 13, 2025
Effective intra-field overlay compensation in lithography via mask-level thermal and mechanical control
Dinghai Rui, Libin Zhang, Yayi Wei, et al.
Optics Express
|
June 11, 2026
Region selective super-resolution imaging lithography for 3D via fabrication
Dinghai Rui, LiBin Zhang, Zongyu Lei, et al.
Page
of 1
Search research articles
Search
Showing results (1-10 of 7) with videos related to
Sort By:
Page
of 1
Nanotechnology
|
April 15, 2025
Enhancing lithographic accuracy by mitigating overlay errors via mask-induced thermal and mechanical optimization
Dinghai Rui, Libin Zhang, Yayi Wei, et al.
Nanoscale Advances
|
September 8, 2025
Method of high-order advanced lithography overlay correction to enhance the manufacturing performance of integrated circuits
Dinghai Rui, Libin Zhang, Yayi Wei, et al.
Optics Express
|
July 30, 2025
Impact of mask errors on imaging quality in surface plasmon lithography
Dinghai Rui, LiBin Zhang, Yayi Wei, et al.
Optics Express
|
August 13, 2025
Super-resolution imaging using surface plasmon resonance cavity lithography
Dinghai Rui, LiBin Zhang, Huwen Ding, et al.
Optics Express
|
November 22, 2024
Source and mask optimization for stability of reticle and wafer stages
Hao Shen, Libin Zhang, Dinghai Rui, et al.
Nanotechnology
|
October 13, 2025
Effective intra-field overlay compensation in lithography via mask-level thermal and mechanical control
Dinghai Rui, Libin Zhang, Yayi Wei, et al.
Optics Express
|
June 11, 2026
Region selective super-resolution imaging lithography for 3D via fabrication
Dinghai Rui, LiBin Zhang, Zongyu Lei, et al.
Page
of 1