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Optics Express|October 6, 2012
1.3-mW tunable and narrow-band continuous-wave light source at 191 nmMatthias Scholz, Dmitrijs Opalevs, Patrick Leisching, et al.
Optics Express|August 23, 2018
Printing sub-micron structures using Talbot mask-aligner lithography with a 193 nm CW laser light sourceAndreas Vetter, Raoul Kirner, Dmitrijs Opalevs, et al.
Optics Express|February 7, 2018
Mask-aligner lithography using a continuous-wave diode laser frequency-quadrupled to 193 nmRaoul Kirner, Andreas Vetter, Dmitrijs Opalevs, et al.
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