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E Soylemez

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The Review of Scientific Instruments|August 2, 2013
Probing microelectromechanical systems in an environmentally controlled chamber using long working distance interferometryE Soylemez, R A Plass, W R Ashurst, et al.
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The Review of Scientific Instruments|August 2, 2013
Probing microelectromechanical systems in an environmentally controlled chamber using long working distance interferometryE Soylemez, R A Plass, W R Ashurst, et al.
Pageof 1