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Micromachines
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March 6, 2025
An Assessment of Local Geometric Uncertainties in Polysilicon MEMS: A Genetic Algorithm and POD-Kriging Surrogate Modeling Approach
Ananya Roy, Francesco Rizzini, Gabriele Gattere, et al.
Micromachines
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February 25, 2023
MEMS Reliability: On-Chip Testing for the Characterization of the Out-of-Plane Polysilicon Strength
Tiago Vicentini Ferreira do Valle, Stefano Mariani, Aldo Ghisi, et al.
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Search research articles
Search
Showing results (1-10 of 2) with videos related to
Sort By:
Page
of 1
Micromachines
|
March 6, 2025
An Assessment of Local Geometric Uncertainties in Polysilicon MEMS: A Genetic Algorithm and POD-Kriging Surrogate Modeling Approach
Ananya Roy, Francesco Rizzini, Gabriele Gattere, et al.
Micromachines
|
February 25, 2023
MEMS Reliability: On-Chip Testing for the Characterization of the Out-of-Plane Polysilicon Strength
Tiago Vicentini Ferreira do Valle, Stefano Mariani, Aldo Ghisi, et al.
Page
of 1