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Optics Letters|June 19, 2007
Lateral scanning confocal microscopy for the determination of in-plane displacements of microelectromechanical systems devicesZhi Li, Konrad Herrmann, Frank PohlenzThe Review of Scientific Instruments|May 2, 2009
A metrological large range atomic force microscope with improved performanceGaoliang Dai, Helmut Wolff, Frank Pohlenz, et al.Pageof 1