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Applied Optics
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September 22, 2010
Chemically amplified soft-x-ray resists: sensitivity, resolution, and molecular photodesorption
G D Kubiak, R Q Hwang, M T Schulberg, et al.
Applied Optics
|
September 22, 2010
Prototype high-speed tape target transport for a laser plasma soft-x-ray projection lithography source
S J Haney, K W Berger, G D Kubiak, et al.
Applied Optics
|
September 22, 2010
Characterization of AZ PN114 resist for soft-x-ray projection lithography
K Early, D M Tennant, D Y Jeon, et al.
Optics Letters
|
September 25, 2009
Diffraction-limited soft-x-ray projection imaging using a laser plasma source
D A Tichenor, G D Kubiak, M E Malinowski, et al.
Applied Optics
|
September 22, 2010
Soft-x-ray projection lithography experiments using Schwarzschild imaging optics
D A Tichenor, G D Kubiak, M E Malinowski, et al.
Page
of 1
Search research articles
Search
Showing results (1-10 of 5) with videos related to
Sort By:
Page
of 1
Applied Optics
|
September 22, 2010
Chemically amplified soft-x-ray resists: sensitivity, resolution, and molecular photodesorption
G D Kubiak, R Q Hwang, M T Schulberg, et al.
Applied Optics
|
September 22, 2010
Prototype high-speed tape target transport for a laser plasma soft-x-ray projection lithography source
S J Haney, K W Berger, G D Kubiak, et al.
Applied Optics
|
September 22, 2010
Characterization of AZ PN114 resist for soft-x-ray projection lithography
K Early, D M Tennant, D Y Jeon, et al.
Optics Letters
|
September 25, 2009
Diffraction-limited soft-x-ray projection imaging using a laser plasma source
D A Tichenor, G D Kubiak, M E Malinowski, et al.
Applied Optics
|
September 22, 2010
Soft-x-ray projection lithography experiments using Schwarzschild imaging optics
D A Tichenor, G D Kubiak, M E Malinowski, et al.
Page
of 1