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Hengrui Guan

Showing results (1-10 of 3) with videos related to

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Sensors (Basel, Switzerland)|November 13, 2020
Deep Learning Correction Algorithm for The Active Optics SystemWenxiang Li, Chao Kang, Hengrui Guan, et al.
Micromachines|May 27, 2026
High-Precision Localization Algorithm for Target Symmetry Center in Image-Based Overlay MetrologyWuhao Liu, Maoxin Song, Shuming Shi, et al.
Micromachines|June 26, 2026
High-Precision LCCD-Based Focus Metrology for I-Line Lithography: Multi-Sample Repeatability and Adaptability EvaluationHengrui Guan, Xinxin Zhao, Yuheng Chu, et al.
Pageof 1

Showing results (1-10 of 3) with videos related to

Sort By:
Pageof 1
Sensors (Basel, Switzerland)|November 13, 2020
Deep Learning Correction Algorithm for The Active Optics SystemWenxiang Li, Chao Kang, Hengrui Guan, et al.
Micromachines|May 27, 2026
High-Precision Localization Algorithm for Target Symmetry Center in Image-Based Overlay MetrologyWuhao Liu, Maoxin Song, Shuming Shi, et al.
Micromachines|June 26, 2026
High-Precision LCCD-Based Focus Metrology for I-Line Lithography: Multi-Sample Repeatability and Adaptability EvaluationHengrui Guan, Xinxin Zhao, Yuheng Chu, et al.
Pageof 1