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Hideaki Nakatsubo

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Advanced Science (Weinheim, Baden-Wurttemberg, Germany)|November 24, 2025
Small and Simple Molecular Structure Based Thermally Stable Ruthenium Precursor in Advancing Ruthenium ALD Process for Scaled Interconnect MetallizationHideaki Nakatsubo, Debananda Mohapatra, Eun-Soo Lee, et al.
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Showing results (1-10 of 1) with videos related to

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Advanced Science (Weinheim, Baden-Wurttemberg, Germany)|November 24, 2025
Small and Simple Molecular Structure Based Thermally Stable Ruthenium Precursor in Advancing Ruthenium ALD Process for Scaled Interconnect MetallizationHideaki Nakatsubo, Debananda Mohapatra, Eun-Soo Lee, et al.
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