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Microsystems & Nanoengineering|July 11, 2025
Volatile and non-volatile nano-electromechanical switches fabricated in a CMOS-compatible silicon-on-insulator foundry processYingying Li, Simon J Bleiker, Elliott Worsey, et al.
Optics Express|February 24, 2023
Vacuum-sealed silicon photonic MEMS tunable ring resonator with an independent control over coupling and phasePierre Edinger, Gaehun Jo, Chris Phong Van Nguyen, et al.
Microsystems & Nanoengineering|March 23, 2023
Integrated silicon photonic MEMSNiels Quack, Alain Yuji Takabayashi, Hamed Sattari, et al.
Microsystems & Nanoengineering|January 25, 2024
Correction: Integrated silicon photonic MEMSNiels Quack, Alain Yuji Takabayashi, Hamed Sattari, et al.
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