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Joern-Holger Franke

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ACS Applied Materials & Interfaces|August 11, 2025
Study on Next-Generation EUV Lithography Technology: Hyper NA, the Highest Potential for Practical ImplementationInhwan Lee, Joern-Holger Franke, Vicky Philipsen, et al.
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Pageof 1
ACS Applied Materials & Interfaces|August 11, 2025
Study on Next-Generation EUV Lithography Technology: Hyper NA, the Highest Potential for Practical ImplementationInhwan Lee, Joern-Holger Franke, Vicky Philipsen, et al.
Pageof 1